Deposition Technologies and Their Applications
Deposition Technologies and Their Applications
MAT SCI XLC 224
This course is part of the UCLA Henry Samueli School of Engineering and Applied Science (HSSEAS) Master of Science in Engineering Online (MSOL) program. It is available only to students pre-approved by HSSEAS. For more information visit msol.ucla.edu.
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About This Course
MSE 224 Deposition Technologies and their Applications (Instructor: Prof. Xie, Y.H.) Lecture, four hours; outside study, eight hours. Examination of physics behind majority of modern thin film deposition technologies based on vapor phase transport. Basic vacuum technology and gas kinetics. Deposition methods used in high-technology applications. Theory and experimental details of physical vapor deposition (PVD), chemical vapor deposition (CVD), plasma-enhanced chemical vapor deposition processes.